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中国物理学会期刊
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Xin Yu, Di Xiao-Lian, Yu Yi-Qing, Ning Zhao-Yuan. Generation of multi-source inductively coupled plasma and its diagnosticsJ. Acta Physica Sinica, 2006, 55(7): 3494-3500. DOI: 10.7498/aps.55.3494
Citation: Xin Yu, Di Xiao-Lian, Yu Yi-Qing, Ning Zhao-Yuan. Generation of multi-source inductively coupled plasma and its diagnosticsJ. Acta Physica Sinica, 2006, 55(7): 3494-3500. DOI: 10.7498/aps.55.3494
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Generation of multi-source inductively coupled plasma and its diagnostics

Acta Phys. Sin., 2006, 55(7): 3494-3500.
DOI: 10.7498/aps.55.3494
CSTR: 32037.14.aps.55.3494
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