Preparation and mechanism of p-type ZnO films formed by modified ion beam enhanced deposition method

Yuan Ning-Yi; Li Jin-Hua; Fan Li-Ning; Wang Xiu-Qin; Xie Jian-Sheng

doi:10.7498/aps.55.3581

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Yuan Ning-Yi, Li Jin-Hua, Fan Li-Ning, Wang Xiu-Qin, Xie Jian-Sheng. Preparation and mechanism of p-type ZnO films formed by modified ion beam enhanced deposition methodJ. Acta Physica Sinica, 2006, 55(7): 3581-3584. DOI: 10.7498/aps.55.3581

Citation:

Yuan Ning-Yi, Li Jin-Hua, Fan Li-Ning, Wang Xiu-Qin, Xie Jian-Sheng. Preparation and mechanism of p-type ZnO films formed by modified ion beam enhanced deposition methodJ. Acta Physica Sinica, 2006, 55(7): 3581-3584. DOI: 10.7498/aps.55.3581

Citation:

Yuan Ning-Yi, Li Jin-Hua, Fan Li-Ning, Wang Xiu-Qin, Xie Jian-Sheng. Preparation and mechanism of p-type ZnO films formed by modified ion beam enhanced deposition methodJ. Acta Physica Sinica, 2006, 55(7): 3581-3584. DOI: 10.7498/aps.55.3581