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中国物理学会期刊
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Li Yong, Sun Cheng-Wei, Liu Zhi-Wen, Zhang Qing-Yu. Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectraJ. Acta Physica Sinica, 2006, 55(8): 4232-4237. DOI: 10.7498/aps.55.4232
Citation: Li Yong, Sun Cheng-Wei, Liu Zhi-Wen, Zhang Qing-Yu. Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectraJ. Acta Physica Sinica, 2006, 55(8): 4232-4237. DOI: 10.7498/aps.55.4232
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Study of ZnO film growth by reactive magnetron sputtering using plasma emission spectra

Acta Phys. Sin., 2006, 55(8): 4232-4237.
DOI: 10.7498/aps.55.4232
CSTR: 32037.14.aps.55.4232
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