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Yang Hang-Sheng. Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor depositionJ. Acta Physica Sinica, 2006, 55(8): 4238-4246. DOI: 10.7498/aps.55.4238
Citation: Yang Hang-Sheng. Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor depositionJ. Acta Physica Sinica, 2006, 55(8): 4238-4246. DOI: 10.7498/aps.55.4238
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Surface growth mechanism of cubic boron nitride thin films prepared by plasma-enhanced chemical vapor deposition

Acta Phys. Sin., 2006, 55(8): 4238-4246.
DOI: 10.7498/aps.55.4238
CSTR: 32037.14.aps.55.4238
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