The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of results

Jin Xiao-Lin; Yang Zhong-Hai

doi:10.7498/aps.55.5935

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Jin Xiao-Lin, Yang Zhong-Hai. The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of resultsJ. Acta Physica Sinica, 2006, 55(11): 5935-5941. DOI: 10.7498/aps.55.5935

Citation:

Jin Xiao-Lin, Yang Zhong-Hai. The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of resultsJ. Acta Physica Sinica, 2006, 55(11): 5935-5941. DOI: 10.7498/aps.55.5935

Citation:

Jin Xiao-Lin, Yang Zhong-Hai. The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge (Ⅱ)——Numerical simulation and discussion of resultsJ. Acta Physica Sinica, 2006, 55(11): 5935-5941. DOI: 10.7498/aps.55.5935