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中国物理学会期刊
Liu Yan, Dong Yun-Shan, Yue Jian-Ling, Li Ge-Yang. Crystal growth and superhardness effects of ZrN/AlON nanomultilayers synthesized by reactive magnetron sputteringJ. Acta Physica Sinica, 2006, 55(11): 6013-6019. DOI: 10.7498/aps.55.6013
Citation: Liu Yan, Dong Yun-Shan, Yue Jian-Ling, Li Ge-Yang. Crystal growth and superhardness effects of ZrN/AlON nanomultilayers synthesized by reactive magnetron sputteringJ. Acta Physica Sinica, 2006, 55(11): 6013-6019. DOI: 10.7498/aps.55.6013

Crystal growth and superhardness effects of ZrN/AlON nanomultilayers synthesized by reactive magnetron sputtering

CSTR: 32037.14.aps.55.6013
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