Double-level charge storage in self-aligned doubly-stacked Si nanocrystals in SiNx dielectric

Wang Jiu-Min; Chen Kun-Ji; Song Jie; Yu Lin-Wei; Wu Liang-Cai; Li Wei; Huang Xin-Fan

doi:10.7498/aps.55.6080

Search

x

Wang Jiu-Min, Chen Kun-Ji, Song Jie, Yu Lin-Wei, Wu Liang-Cai, Li Wei, Huang Xin-Fan. Double-level charge storage in self-aligned doubly-stacked Si nanocrystals in SiNx dielectricJ. Acta Physica Sinica, 2006, 55(11): 6080-6084. DOI: 10.7498/aps.55.6080

Citation:

Wang Jiu-Min, Chen Kun-Ji, Song Jie, Yu Lin-Wei, Wu Liang-Cai, Li Wei, Huang Xin-Fan. Double-level charge storage in self-aligned doubly-stacked Si nanocrystals in SiNx dielectricJ. Acta Physica Sinica, 2006, 55(11): 6080-6084. DOI: 10.7498/aps.55.6080

Citation:

Wang Jiu-Min, Chen Kun-Ji, Song Jie, Yu Lin-Wei, Wu Liang-Cai, Li Wei, Huang Xin-Fan. Double-level charge storage in self-aligned doubly-stacked Si nanocrystals in SiNx dielectricJ. Acta Physica Sinica, 2006, 55(11): 6080-6084. DOI: 10.7498/aps.55.6080