Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVD

Liu Guo-Han; Ding Yi; Zhu Xiu-Hong; Chen Guang-Hua; He De-Yan

doi:10.7498/aps.55.6147

Search

x

Liu Guo-Han, Ding Yi, Zhu Xiu-Hong, Chen Guang-Hua, He De-Yan. Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVDJ. Acta Physica Sinica, 2006, 55(11): 6147-6151. DOI: 10.7498/aps.55.6147

Citation:

Liu Guo-Han, Ding Yi, Zhu Xiu-Hong, Chen Guang-Hua, He De-Yan. Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVDJ. Acta Physica Sinica, 2006, 55(11): 6147-6151. DOI: 10.7498/aps.55.6147

Citation:

Liu Guo-Han, Ding Yi, Zhu Xiu-Hong, Chen Guang-Hua, He De-Yan. Preparation and characterization of hydrogenated microcrystalline silicon films by HW-MWECR-CVDJ. Acta Physica Sinica, 2006, 55(11): 6147-6151. DOI: 10.7498/aps.55.6147