Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-films

Gu Pei-Fu; Zheng Zhen-Rong; Zhao Yong-Jiang; Liu Xu

doi:10.7498/aps.55.6459

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Gu Pei-Fu, Zheng Zhen-Rong, Zhao Yong-Jiang, Liu Xu. Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-filmsJ. Acta Physica Sinica, 2006, 55(12): 6459-6463. DOI: 10.7498/aps.55.6459

Citation:

Gu Pei-Fu, Zheng Zhen-Rong, Zhao Yong-Jiang, Liu Xu. Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-filmsJ. Acta Physica Sinica, 2006, 55(12): 6459-6463. DOI: 10.7498/aps.55.6459

Citation:

Gu Pei-Fu, Zheng Zhen-Rong, Zhao Yong-Jiang, Liu Xu. Study on the mechanism and measurement of stress of TiO2 and SiO2 thin-filmsJ. Acta Physica Sinica, 2006, 55(12): 6459-6463. DOI: 10.7498/aps.55.6459