Optical-readout micro-cantilever array IR imaging system and performance analysis

Xiong Zhi_Ming; Zhang Qing_Chuan; Chen Da_Peng; Wu Xiao_Ping; Guo Zhe_Ying; Dong Feng_Liang; Miao Zheng_Yu; Li Chao_Bo

doi:10.7498/aps.56.2529

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Xiong Zhi_Ming, Zhang Qing_Chuan, Chen Da_Peng, Wu Xiao_Ping, Guo Zhe_Ying, Dong Feng_Liang, Miao Zheng_Yu, Li Chao_Bo. Optical-readout micro-cantilever array IR imaging system and performance analysisJ. Acta Physica Sinica, 2007, 56(5): 2529-2536. DOI: 10.7498/aps.56.2529

Citation:

Xiong Zhi_Ming, Zhang Qing_Chuan, Chen Da_Peng, Wu Xiao_Ping, Guo Zhe_Ying, Dong Feng_Liang, Miao Zheng_Yu, Li Chao_Bo. Optical-readout micro-cantilever array IR imaging system and performance analysisJ. Acta Physica Sinica, 2007, 56(5): 2529-2536. DOI: 10.7498/aps.56.2529

Citation:

Xiong Zhi_Ming, Zhang Qing_Chuan, Chen Da_Peng, Wu Xiao_Ping, Guo Zhe_Ying, Dong Feng_Liang, Miao Zheng_Yu, Li Chao_Bo. Optical-readout micro-cantilever array IR imaging system and performance analysisJ. Acta Physica Sinica, 2007, 56(5): 2529-2536. DOI: 10.7498/aps.56.2529