RF magnetron sputtering of GaP thin film and computer simulation of its depositing process

Li Yang-Ping; Liu Zheng-Tang; Zhao Hai-Long; Liu Wen-Ting; Yan Feng

doi:10.7498/aps.56.2937

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Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng. RF magnetron sputtering of GaP thin film and computer simulation of its depositing processJ. Acta Physica Sinica, 2007, 56(5): 2937-2944. DOI: 10.7498/aps.56.2937

Citation:

Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng. RF magnetron sputtering of GaP thin film and computer simulation of its depositing processJ. Acta Physica Sinica, 2007, 56(5): 2937-2944. DOI: 10.7498/aps.56.2937

Citation:

Li Yang-Ping, Liu Zheng-Tang, Zhao Hai-Long, Liu Wen-Ting, Yan Feng. RF magnetron sputtering of GaP thin film and computer simulation of its depositing processJ. Acta Physica Sinica, 2007, 56(5): 2937-2944. DOI: 10.7498/aps.56.2937