Study on FN-DLC thin films: (Ⅳ) effect of nitrogen doping on structural properties of films

Xiao Jian-Rong; Xu Hui; Wang Huan-You; Deng Chao-Sheng; Li Ming-Jun

doi:10.7498/aps.56.3004

Search

x

Xiao Jian-Rong, Xu Hui, Wang Huan-You, Deng Chao-Sheng, Li Ming-Jun. Study on FN-DLC thin films: (Ⅳ) effect of nitrogen doping on structural properties of filmsJ. Acta Physica Sinica, 2007, 56(5): 3004-3009. DOI: 10.7498/aps.56.3004

Citation:

Xiao Jian-Rong, Xu Hui, Wang Huan-You, Deng Chao-Sheng, Li Ming-Jun. Study on FN-DLC thin films: (Ⅳ) effect of nitrogen doping on structural properties of filmsJ. Acta Physica Sinica, 2007, 56(5): 3004-3009. DOI: 10.7498/aps.56.3004

Citation:

Xiao Jian-Rong, Xu Hui, Wang Huan-You, Deng Chao-Sheng, Li Ming-Jun. Study on FN-DLC thin films: (Ⅳ) effect of nitrogen doping on structural properties of filmsJ. Acta Physica Sinica, 2007, 56(5): 3004-3009. DOI: 10.7498/aps.56.3004