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中国物理学会期刊
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Wang Jun-Zhong, Ji Yuan, Wang Xiao-Dong, Liu Zhi-Min, Luo Jun-Feng, Li Zhi-Guo. Microstructures of Al and Cu interconnectsJ. Acta Physica Sinica, 2007, 56(1): 371-375. DOI: 10.7498/aps.56.371
Citation: Wang Jun-Zhong, Ji Yuan, Wang Xiao-Dong, Liu Zhi-Min, Luo Jun-Feng, Li Zhi-Guo. Microstructures of Al and Cu interconnectsJ. Acta Physica Sinica, 2007, 56(1): 371-375. DOI: 10.7498/aps.56.371
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Microstructures of Al and Cu interconnects

Acta Phys. Sin., 2007, 56(1): 371-375.
DOI: 10.7498/aps.56.371
CSTR: 32037.14.aps.56.371
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