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中国物理学会期刊
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Chen Yong-Sheng, Gao Xiao-Yong, Yang Shi-E, Lu Jing-Xiao, Gu Jin-Hua. The influence of deposition temperature on the structure of microcrystalline silicon filmJ. Acta Physica Sinica, 2007, 56(7): 4122-4126. DOI: 10.7498/aps.56.4122
Citation: Chen Yong-Sheng, Gao Xiao-Yong, Yang Shi-E, Lu Jing-Xiao, Gu Jin-Hua. The influence of deposition temperature on the structure of microcrystalline silicon filmJ. Acta Physica Sinica, 2007, 56(7): 4122-4126. DOI: 10.7498/aps.56.4122
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The influence of deposition temperature on the structure of microcrystalline silicon film

Acta Phys. Sin., 2007, 56(7): 4122-4126.
DOI: 10.7498/aps.56.4122
CSTR: 32037.14.aps.56.4122
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