Li Wei, Xu Ling, Sun Ping, Zhao Wei-Ming, Huang Xin-Fan, Xu Jun, Chen Kun-Ji. Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithographyJ. Acta Physica Sinica, 2007, 56(7): 4242-4246. DOI: 10.7498/aps.56.4242
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Citation:
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Li Wei, Xu Ling, Sun Ping, Zhao Wei-Ming, Huang Xin-Fan, Xu Jun, Chen Kun-Ji. Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithographyJ. Acta Physica Sinica, 2007, 56(7): 4242-4246. DOI: 10.7498/aps.56.4242
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Li Wei, Xu Ling, Sun Ping, Zhao Wei-Ming, Huang Xin-Fan, Xu Jun, Chen Kun-Ji. Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithographyJ. Acta Physica Sinica, 2007, 56(7): 4242-4246. DOI: 10.7498/aps.56.4242
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Citation:
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Li Wei, Xu Ling, Sun Ping, Zhao Wei-Ming, Huang Xin-Fan, Xu Jun, Chen Kun-Ji. Size and morphology control of highly-ordered nano-silicon pillar fabricated by direct nanosphere lithographyJ. Acta Physica Sinica, 2007, 56(7): 4242-4246. DOI: 10.7498/aps.56.4242
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