Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantation

Huang Yong-Xian; Tian Xiu-Bo; Yang Shi-Qin; Ricky Fu; Paul Chu K.

doi:10.7498/aps.56.4762

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Huang Yong-Xian, Tian Xiu-Bo, Yang Shi-Qin, Ricky Fu, Paul Chu K.. Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantationJ. Acta Physica Sinica, 2007, 56(8): 4762-4770. DOI: 10.7498/aps.56.4762

Citation:

Huang Yong-Xian, Tian Xiu-Bo, Yang Shi-Qin, Ricky Fu, Paul Chu K.. Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantationJ. Acta Physica Sinica, 2007, 56(8): 4762-4770. DOI: 10.7498/aps.56.4762

Citation:

Huang Yong-Xian, Tian Xiu-Bo, Yang Shi-Qin, Ricky Fu, Paul Chu K.. Effect of rise-time patterns on dynamics of sheath expansion during plasma immersion ion implantationJ. Acta Physica Sinica, 2007, 56(8): 4762-4770. DOI: 10.7498/aps.56.4762