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Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputteringJ. Acta Physica Sinica, 2007, 56(12): 7188-7194. DOI: 10.7498/aps.56.7188
Citation: Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputteringJ. Acta Physica Sinica, 2007, 56(12): 7188-7194. DOI: 10.7498/aps.56.7188
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Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering

Acta Phys. Sin., 2007, 56(12): 7188-7194.
DOI: 10.7498/aps.56.7188
CSTR: 32037.14.aps.56.7188
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