Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxy

He Meng; Liu Guo-Zhen; Qiu Jie; Xing Jie; Lü Hui-Bin

doi:10.7498/aps.57.1236

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He Meng, Liu Guo-Zhen, Qiu Jie, Xing Jie, Lü Hui-Bin. Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxyJ. Acta Physica Sinica, 2008, 57(2): 1236-1240. DOI: 10.7498/aps.57.1236

Citation:

He Meng, Liu Guo-Zhen, Qiu Jie, Xing Jie, Lü Hui-Bin. Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxyJ. Acta Physica Sinica, 2008, 57(2): 1236-1240. DOI: 10.7498/aps.57.1236

Citation:

He Meng, Liu Guo-Zhen, Qiu Jie, Xing Jie, Lü Hui-Bin. Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxyJ. Acta Physica Sinica, 2008, 57(2): 1236-1240. DOI: 10.7498/aps.57.1236