Yang Shi-E, Wen Li-Wei, Chen Yong-Sheng, Wang Chang-Zhou, Gu Jin-Hua, Gao Xiao-Yong, Lu Jing-Xiao. Substrate temperature and B-doping effects on microstructure and electronic properties of p-type hydrogenated microcrystalline silicon filmsJ. Acta Physica Sinica, 2008, 57(8): 5176-5181. DOI: 10.7498/aps.57.5176