Liu Shi-Yuan, Gu Hua-Yong, Zhang Chuan-Wei, Shen Hong-Wei. A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximationJ. Acta Physica Sinica, 2008, 57(9): 5996-6001. DOI: 10.7498/aps.57.5996
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Citation:
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Liu Shi-Yuan, Gu Hua-Yong, Zhang Chuan-Wei, Shen Hong-Wei. A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximationJ. Acta Physica Sinica, 2008, 57(9): 5996-6001. DOI: 10.7498/aps.57.5996
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Liu Shi-Yuan, Gu Hua-Yong, Zhang Chuan-Wei, Shen Hong-Wei. A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximationJ. Acta Physica Sinica, 2008, 57(9): 5996-6001. DOI: 10.7498/aps.57.5996
|
Citation:
|
Liu Shi-Yuan, Gu Hua-Yong, Zhang Chuan-Wei, Shen Hong-Wei. A fast algorithm for reflectivity calculation of micro/nano deep trench structures by corrected effective medium approximationJ. Acta Physica Sinica, 2008, 57(9): 5996-6001. DOI: 10.7498/aps.57.5996
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