Research on the high-rate deposition of μc-Si:H by VHF-PECVD

Guo Xue-Jun; Lu Jing-Xiao; Chen Yong-Sheng; Zhang Qing-Feng; Wen Shu-Tang; Zheng Wen; Shen Chen-Hai; Chen Qing-Dong

doi:10.7498/aps.57.6002

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Guo Xue-Jun, Lu Jing-Xiao, Chen Yong-Sheng, Zhang Qing-Feng, Wen Shu-Tang, Zheng Wen, Shen Chen-Hai, Chen Qing-Dong. Research on the high-rate deposition of μc-Si:H by VHF-PECVDJ. Acta Physica Sinica, 2008, 57(9): 6002-6006. DOI: 10.7498/aps.57.6002

Citation:

Guo Xue-Jun, Lu Jing-Xiao, Chen Yong-Sheng, Zhang Qing-Feng, Wen Shu-Tang, Zheng Wen, Shen Chen-Hai, Chen Qing-Dong. Research on the high-rate deposition of μc-Si:H by VHF-PECVDJ. Acta Physica Sinica, 2008, 57(9): 6002-6006. DOI: 10.7498/aps.57.6002

Citation:

Guo Xue-Jun, Lu Jing-Xiao, Chen Yong-Sheng, Zhang Qing-Feng, Wen Shu-Tang, Zheng Wen, Shen Chen-Hai, Chen Qing-Dong. Research on the high-rate deposition of μc-Si:H by VHF-PECVDJ. Acta Physica Sinica, 2008, 57(9): 6002-6006. DOI: 10.7498/aps.57.6002