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中国物理学会期刊
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Han Liang, Zhao Yu-Qing, Zhang Hai-Bo. The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputteringJ. Acta Physica Sinica, 2008, 57(2): 996-1000. DOI: 10.7498/aps.57.996
Citation: Han Liang, Zhao Yu-Qing, Zhang Hai-Bo. The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputteringJ. Acta Physica Sinica, 2008, 57(2): 996-1000. DOI: 10.7498/aps.57.996
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The research on half-analytical method in calculating the magnetic field of unbalanced magnetron sputtering

Acta Phys. Sin., 2008, 57(2): 996-1000.
DOI: 10.7498/aps.57.996
CSTR: 32037.14.aps.57.996
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