Crystallization of Si3N4 on h-AlN and superhardness effect of AlN/Si3N4 nanomultilayers

Wu Xiao-Yan; Kong Ming; Li Ge-Yang; Zhao Wen-Ji

doi:10.7498/aps.58.2654

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Wu Xiao-Yan, Kong Ming, Li Ge-Yang, Zhao Wen-Ji. Crystallization of Si3N4 on h-AlN and superhardness effect of AlN/Si3N4 nanomultilayersJ. Acta Physica Sinica, 2009, 58(4): 2654-2659. DOI: 10.7498/aps.58.2654

Citation:

Wu Xiao-Yan, Kong Ming, Li Ge-Yang, Zhao Wen-Ji. Crystallization of Si3N4 on h-AlN and superhardness effect of AlN/Si3N4 nanomultilayersJ. Acta Physica Sinica, 2009, 58(4): 2654-2659. DOI: 10.7498/aps.58.2654

Citation:

Wu Xiao-Yan, Kong Ming, Li Ge-Yang, Zhao Wen-Ji. Crystallization of Si3N4 on h-AlN and superhardness effect of AlN/Si3N4 nanomultilayersJ. Acta Physica Sinica, 2009, 58(4): 2654-2659. DOI: 10.7498/aps.58.2654