An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering

Ding Wan-Yu; Xu Jun; Lu Wen-Qi; Deng Xin-Lu; Dong Chuang

doi:10.7498/aps.58.4109

Search

x

Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputteringJ. Acta Physica Sinica, 2009, 58(6): 4109-4116. DOI: 10.7498/aps.58.4109

Citation:

Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputteringJ. Acta Physica Sinica, 2009, 58(6): 4109-4116. DOI: 10.7498/aps.58.4109

Citation:

Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputteringJ. Acta Physica Sinica, 2009, 58(6): 4109-4116. DOI: 10.7498/aps.58.4109