Gu Jin-Hua, Ding Yan-Li, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao. A spectroscopic ellipsometry study of the abnormal scaling behavior of high-rate-deposited microcrystalline silicon films by VHF-PECVD techniqueJ. Acta Physica Sinica, 2009, 58(6): 4123-4127. DOI: 10.7498/aps.58.4123
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Citation:
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Gu Jin-Hua, Ding Yan-Li, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao. A spectroscopic ellipsometry study of the abnormal scaling behavior of high-rate-deposited microcrystalline silicon films by VHF-PECVD techniqueJ. Acta Physica Sinica, 2009, 58(6): 4123-4127. DOI: 10.7498/aps.58.4123
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Gu Jin-Hua, Ding Yan-Li, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao. A spectroscopic ellipsometry study of the abnormal scaling behavior of high-rate-deposited microcrystalline silicon films by VHF-PECVD techniqueJ. Acta Physica Sinica, 2009, 58(6): 4123-4127. DOI: 10.7498/aps.58.4123
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Citation:
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Gu Jin-Hua, Ding Yan-Li, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao. A spectroscopic ellipsometry study of the abnormal scaling behavior of high-rate-deposited microcrystalline silicon films by VHF-PECVD techniqueJ. Acta Physica Sinica, 2009, 58(6): 4123-4127. DOI: 10.7498/aps.58.4123
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