Fabrication of transparent conductive AZO （ZnO:Al） film by plasma enhanced chemical vapor deposition

Chen Zhao-Quan; Liu Ming-Hai; Liu Yu-Ping; Chen Wei; Luo Zhi-Qing; Hu Xi-Wei

doi:10.7498/aps.58.4260

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Chen Zhao-Quan, Liu Ming-Hai, Liu Yu-Ping, Chen Wei, Luo Zhi-Qing, Hu Xi-Wei. Fabrication of transparent conductive AZO （ZnO:Al） film by plasma enhanced chemical vapor depositionJ. Acta Physica Sinica, 2009, 58(6): 4260-4266. DOI: 10.7498/aps.58.4260

Citation:

Chen Zhao-Quan, Liu Ming-Hai, Liu Yu-Ping, Chen Wei, Luo Zhi-Qing, Hu Xi-Wei. Fabrication of transparent conductive AZO （ZnO:Al） film by plasma enhanced chemical vapor depositionJ. Acta Physica Sinica, 2009, 58(6): 4260-4266. DOI: 10.7498/aps.58.4260

Citation:

Chen Zhao-Quan, Liu Ming-Hai, Liu Yu-Ping, Chen Wei, Luo Zhi-Qing, Hu Xi-Wei. Fabrication of transparent conductive AZO （ZnO:Al） film by plasma enhanced chemical vapor depositionJ. Acta Physica Sinica, 2009, 58(6): 4260-4266. DOI: 10.7498/aps.58.4260