Experimental investigation on formation of Al-Si clusters and nanocrystals in the segregation of ion-implanted Al on Si(100)

Gao Hao; Liao Long-Zhong; Zhang Zhao-Hui

doi:10.7498/aps.58.427

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Gao Hao, Liao Long-Zhong, Zhang Zhao-Hui. Experimental investigation on formation of Al-Si clusters and nanocrystals in the segregation of ion-implanted Al on Si(100)J. Acta Physica Sinica, 2009, 58(1): 427-431. DOI: 10.7498/aps.58.427

Citation:

Gao Hao, Liao Long-Zhong, Zhang Zhao-Hui. Experimental investigation on formation of Al-Si clusters and nanocrystals in the segregation of ion-implanted Al on Si(100)J. Acta Physica Sinica, 2009, 58(1): 427-431. DOI: 10.7498/aps.58.427

Citation:

Gao Hao, Liao Long-Zhong, Zhang Zhao-Hui. Experimental investigation on formation of Al-Si clusters and nanocrystals in the segregation of ion-implanted Al on Si(100)J. Acta Physica Sinica, 2009, 58(1): 427-431. DOI: 10.7498/aps.58.427