Ding Wan-Yu, Wang Hua-Lin, Miao Zhuang, Zhang Jun-Ji, Chai Wei-Ping. Influence of deposition parameter on chemical structure and moisture resistant properties for SiNx films deposited by DC pulse magnetron sputteringJ. Acta Physica Sinica, 2009, 58(1): 432-437. DOI: 10.7498/aps.58.432