Molecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted deposition

Kai Hua; Li Yun-Chao; Guo De-Cheng; Li Shuang; Li Zhi-Jie

doi:10.7498/aps.58.4888

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Kai Hua, Li Yun-Chao, Guo De-Cheng, Li Shuang, Li Zhi-Jie. Molecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted depositionJ. Acta Physica Sinica, 2009, 58(7): 4888-4894. DOI: 10.7498/aps.58.4888

Citation:

Kai Hua, Li Yun-Chao, Guo De-Cheng, Li Shuang, Li Zhi-Jie. Molecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted depositionJ. Acta Physica Sinica, 2009, 58(7): 4888-4894. DOI: 10.7498/aps.58.4888

Citation:

Kai Hua, Li Yun-Chao, Guo De-Cheng, Li Shuang, Li Zhi-Jie. Molecular dynamics simulation of the structure characteristic of diamond-like carbon films influence by oblique incidence ion-beam-assisted depositionJ. Acta Physica Sinica, 2009, 58(7): 4888-4894. DOI: 10.7498/aps.58.4888