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中国物理学会期刊
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Li Yang-Ping, Liu Zheng-Tang. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP filmJ. Acta Physica Sinica, 2009, 58(7): 5022-5028. DOI: 10.7498/aps.58.5022
Citation: Li Yang-Ping, Liu Zheng-Tang. Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP filmJ. Acta Physica Sinica, 2009, 58(7): 5022-5028. DOI: 10.7498/aps.58.5022
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Plasma emission diagnostics for the optimization of deposition parameters in RF magnetron sputtering of GaP film

Acta Phys. Sin., 2009, 58(7): 5022-5028.
DOI: 10.7498/aps.58.5022
CSTR: 32037.14.aps.58.5022
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