Influence of duty ratio on the fabrication of a-C:H film on microshell

Zhang Bao-Ling; He Zhi-Bing; Wu Wei-Dong; Liu Xing-Hua; Yang Xiang-Dong

doi:10.7498/aps.58.6436

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Zhang Bao-Ling, He Zhi-Bing, Wu Wei-Dong, Liu Xing-Hua, Yang Xiang-Dong. Influence of duty ratio on the fabrication of a-C:H film on microshellJ. Acta Physica Sinica, 2009, 58(9): 6436-6440. DOI: 10.7498/aps.58.6436

Citation:

Zhang Bao-Ling, He Zhi-Bing, Wu Wei-Dong, Liu Xing-Hua, Yang Xiang-Dong. Influence of duty ratio on the fabrication of a-C:H film on microshellJ. Acta Physica Sinica, 2009, 58(9): 6436-6440. DOI: 10.7498/aps.58.6436

Citation:

Zhang Bao-Ling, He Zhi-Bing, Wu Wei-Dong, Liu Xing-Hua, Yang Xiang-Dong. Influence of duty ratio on the fabrication of a-C:H film on microshellJ. Acta Physica Sinica, 2009, 58(9): 6436-6440. DOI: 10.7498/aps.58.6436