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中国物理学会期刊
Zhang Ji-Tao, Li Yan, Luo Zhi-Yong. A traceable calibration method for spectroscopic ellipsometryJ. Acta Physica Sinica, 2010, 59(1): 186-191. DOI: 10.7498/aps.59.186
Citation: Zhang Ji-Tao, Li Yan, Luo Zhi-Yong. A traceable calibration method for spectroscopic ellipsometryJ. Acta Physica Sinica, 2010, 59(1): 186-191. DOI: 10.7498/aps.59.186

A traceable calibration method for spectroscopic ellipsometry

CSTR: 32037.14.aps.59.186
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