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中国物理学会期刊
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Zhang Yong, Zhang Chong-Hong, Zhou Li-Hong, Li Bing-Sheng, Yang Yi-Tao. Study on nanohardness of helium-implanted 4H-SiCJ. Acta Physica Sinica, 2010, 59(6): 4130-4135. DOI: 10.7498/aps.59.4130
Citation: Zhang Yong, Zhang Chong-Hong, Zhou Li-Hong, Li Bing-Sheng, Yang Yi-Tao. Study on nanohardness of helium-implanted 4H-SiCJ. Acta Physica Sinica, 2010, 59(6): 4130-4135. DOI: 10.7498/aps.59.4130
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Study on nanohardness of helium-implanted 4H-SiC

Acta Phys. Sin., 2010, 59(6): 4130-4135.
DOI: 10.7498/aps.59.4130
CSTR: 32037.14.aps.59.4130
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