A kinetic model for silicon film growth by silane/hydrogen glow discharge

Zhang Hong-Wei; Chen Gai-Rong; Zhang Li-Wei; Lu Jing-Xiao; Wen Shu-Tang

doi:10.7498/aps.59.4901

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Zhang Hong-Wei, Chen Gai-Rong, Zhang Li-Wei, Lu Jing-Xiao, Wen Shu-Tang. A kinetic model for silicon film growth by silane/hydrogen glow dischargeJ. Acta Physica Sinica, 2010, 59(7): 4901-4910. DOI: 10.7498/aps.59.4901

Citation:

Zhang Hong-Wei, Chen Gai-Rong, Zhang Li-Wei, Lu Jing-Xiao, Wen Shu-Tang. A kinetic model for silicon film growth by silane/hydrogen glow dischargeJ. Acta Physica Sinica, 2010, 59(7): 4901-4910. DOI: 10.7498/aps.59.4901

Citation:

Zhang Hong-Wei, Chen Gai-Rong, Zhang Li-Wei, Lu Jing-Xiao, Wen Shu-Tang. A kinetic model for silicon film growth by silane/hydrogen glow dischargeJ. Acta Physica Sinica, 2010, 59(7): 4901-4910. DOI: 10.7498/aps.59.4901