Investigation of the lateral spread of Er ions implanted in 6H-SiC

Qin Xi-Feng; Wang Feng-Xiang; Liang Yi; Fu Gang; Zhao You-Mei

doi:10.7498/aps.59.6390

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Qin Xi-Feng, Wang Feng-Xiang, Liang Yi, Fu Gang, Zhao You-Mei. Investigation of the lateral spread of Er ions implanted in 6H-SiCJ. Acta Physica Sinica, 2010, 59(9): 6390-6393. DOI: 10.7498/aps.59.6390

Citation:

Qin Xi-Feng, Wang Feng-Xiang, Liang Yi, Fu Gang, Zhao You-Mei. Investigation of the lateral spread of Er ions implanted in 6H-SiCJ. Acta Physica Sinica, 2010, 59(9): 6390-6393. DOI: 10.7498/aps.59.6390

Citation:

Qin Xi-Feng, Wang Feng-Xiang, Liang Yi, Fu Gang, Zhao You-Mei. Investigation of the lateral spread of Er ions implanted in 6H-SiCJ. Acta Physica Sinica, 2010, 59(9): 6390-6393. DOI: 10.7498/aps.59.6390