Wang Bo, Liang Zhong-Zhu, Kong Yan-Mei, Liang Jing-Qiu, Fu Jian-Guo, Zheng Ying, Zhu Wan-Bin, Lü Jin-Guang, Wang Wei-Biao, Pei Shu, Zhang Jun. Design and fabrication of micro multi-mirrors based on silicon for micro-spectrometerJ. Acta Physica Sinica, 2010, 59(2): 907-912. DOI: 10.7498/aps.59.907