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Di Guo-Qing. Surface morphology and optical properties of Ta2O5 films prepared by radio frequency sputteringJ. Acta Physica Sinica, 2011, 60(3): 038101. DOI: 10.7498/aps.60.038101
Citation: Di Guo-Qing. Surface morphology and optical properties of Ta2O5 films prepared by radio frequency sputteringJ. Acta Physica Sinica, 2011, 60(3): 038101. DOI: 10.7498/aps.60.038101
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Surface morphology and optical properties of Ta2O5 films prepared by radio frequency sputtering

Acta Phys. Sin., 2011, 60(3): 038101.
DOI: 10.7498/aps.60.038101
CSTR: 32037.14.aps.60.038101
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