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Gao Bi-Rong, Liu Yue. Numerical study on uniformity of electron cyclotron resonance plasma densityJ. Acta Physica Sinica, 2011, 60(4): 045201. DOI: 10.7498/aps.60.045201
Citation: Gao Bi-Rong, Liu Yue. Numerical study on uniformity of electron cyclotron resonance plasma densityJ. Acta Physica Sinica, 2011, 60(4): 045201. DOI: 10.7498/aps.60.045201
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Numerical study on uniformity of electron cyclotron resonance plasma density

Acta Phys. Sin., 2011, 60(4): 045201.
DOI: 10.7498/aps.60.045201
CSTR: 32037.14.aps.60.045201
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