Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model

Wang Peng; Tian Xiu-Bo; Wang Zhi-Jian; Gong Chun-Zhi; Yang Shi-Qin

doi:10.7498/aps.60.085206

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Wang Peng, Tian Xiu-Bo, Wang Zhi-Jian, Gong Chun-Zhi, Yang Shi-Qin. Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell modelJ. Acta Physica Sinica, 2011, 60(8): 085206. DOI: 10.7498/aps.60.085206

Citation:

Wang Peng, Tian Xiu-Bo, Wang Zhi-Jian, Gong Chun-Zhi, Yang Shi-Qin. Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell modelJ. Acta Physica Sinica, 2011, 60(8): 085206. DOI: 10.7498/aps.60.085206

Citation:

Wang Peng, Tian Xiu-Bo, Wang Zhi-Jian, Gong Chun-Zhi, Yang Shi-Qin. Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell modelJ. Acta Physica Sinica, 2011, 60(8): 085206. DOI: 10.7498/aps.60.085206