Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulation

Li Yan-Chao; Wang Chun-Hui; Gao Long; Cong Hai-Fang; Qu Yang

doi:10.7498/aps.61.044207

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Li Yan-Chao, Wang Chun-Hui, Gao Long, Cong Hai-Fang, Qu Yang. Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulationJ. Acta Physica Sinica, 2012, 61(4): 044207. DOI: 10.7498/aps.61.044207

Citation:

Li Yan-Chao, Wang Chun-Hui, Gao Long, Cong Hai-Fang, Qu Yang. Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulationJ. Acta Physica Sinica, 2012, 61(4): 044207. DOI: 10.7498/aps.61.044207

Citation:

Li Yan-Chao, Wang Chun-Hui, Gao Long, Cong Hai-Fang, Qu Yang. Multi-beam laser heterodyne measurement with ultra-precision for the glass thickness based on oscillating mirror sinusoidal modulationJ. Acta Physica Sinica, 2012, 61(4): 044207. DOI: 10.7498/aps.61.044207