Method for improving the accuracy of step height measurement based on optical frequency comb

Zhang Ji-Tao; Wu Xue-Jian; Li Yan; Wei Hao-Yun

doi:10.7498/aps.61.100601

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Zhang Ji-Tao, Wu Xue-Jian, Li Yan, Wei Hao-Yun. Method for improving the accuracy of step height measurement based on optical frequency combJ. Acta Physica Sinica, 2012, 61(10): 100601. DOI: 10.7498/aps.61.100601

Citation:

Zhang Ji-Tao, Wu Xue-Jian, Li Yan, Wei Hao-Yun. Method for improving the accuracy of step height measurement based on optical frequency combJ. Acta Physica Sinica, 2012, 61(10): 100601. DOI: 10.7498/aps.61.100601

Citation:

Zhang Ji-Tao, Wu Xue-Jian, Li Yan, Wei Hao-Yun. Method for improving the accuracy of step height measurement based on optical frequency combJ. Acta Physica Sinica, 2012, 61(10): 100601. DOI: 10.7498/aps.61.100601