The effect of nitrogen ion bombarding energy on the bonding structure of nitrogenated tetrahedral amorphous carbon film

Han Liang; Shao Hong-Xiang; He Liang; Chen Xian; Zhao Yu-Qing

doi:10.7498/aps.61.106803

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Han Liang, Shao Hong-Xiang, He Liang, Chen Xian, Zhao Yu-Qing. The effect of nitrogen ion bombarding energy on the bonding structure of nitrogenated tetrahedral amorphous carbon filmJ. Acta Physica Sinica, 2012, 61(10): 106803. DOI: 10.7498/aps.61.106803

Citation:

Han Liang, Shao Hong-Xiang, He Liang, Chen Xian, Zhao Yu-Qing. The effect of nitrogen ion bombarding energy on the bonding structure of nitrogenated tetrahedral amorphous carbon filmJ. Acta Physica Sinica, 2012, 61(10): 106803. DOI: 10.7498/aps.61.106803

Citation:

Han Liang, Shao Hong-Xiang, He Liang, Chen Xian, Zhao Yu-Qing. The effect of nitrogen ion bombarding energy on the bonding structure of nitrogenated tetrahedral amorphous carbon filmJ. Acta Physica Sinica, 2012, 61(10): 106803. DOI: 10.7498/aps.61.106803