Study on the machining mechanism of fabrication of micro channels in fused silica substrates by laser-induced plasma

Li Shi-Xiong; Bai Zhong-Chen; Huang Zheng; Zhang Xin; Qin Shui-Jie; Mao Wen-Xue

doi:10.7498/aps.61.115201

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Li Shi-Xiong, Bai Zhong-Chen, Huang Zheng, Zhang Xin, Qin Shui-Jie, Mao Wen-Xue. Study on the machining mechanism of fabrication of micro channels in fused silica substrates by laser-induced plasmaJ. Acta Physica Sinica, 2012, 61(11): 115201. DOI: 10.7498/aps.61.115201

Citation:

Li Shi-Xiong, Bai Zhong-Chen, Huang Zheng, Zhang Xin, Qin Shui-Jie, Mao Wen-Xue. Study on the machining mechanism of fabrication of micro channels in fused silica substrates by laser-induced plasmaJ. Acta Physica Sinica, 2012, 61(11): 115201. DOI: 10.7498/aps.61.115201

Citation:

Li Shi-Xiong, Bai Zhong-Chen, Huang Zheng, Zhang Xin, Qin Shui-Jie, Mao Wen-Xue. Study on the machining mechanism of fabrication of micro channels in fused silica substrates by laser-induced plasmaJ. Acta Physica Sinica, 2012, 61(11): 115201. DOI: 10.7498/aps.61.115201