Application of high-k dielectrics in novel semiconductor devices

Huang Li; Huang An-Ping; Zheng Xiao-Hu; Xiao Zhi-Song; Wang Mei

doi:10.7498/aps.61.137701

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Huang Li, Huang An-Ping, Zheng Xiao-Hu, Xiao Zhi-Song, Wang Mei. Application of high-k dielectrics in novel semiconductor devicesJ. Acta Physica Sinica, 2012, 61(13): 137701. DOI: 10.7498/aps.61.137701

Citation:

Huang Li, Huang An-Ping, Zheng Xiao-Hu, Xiao Zhi-Song, Wang Mei. Application of high-k dielectrics in novel semiconductor devicesJ. Acta Physica Sinica, 2012, 61(13): 137701. DOI: 10.7498/aps.61.137701

Citation:

Huang Li, Huang An-Ping, Zheng Xiao-Hu, Xiao Zhi-Song, Wang Mei. Application of high-k dielectrics in novel semiconductor devicesJ. Acta Physica Sinica, 2012, 61(13): 137701. DOI: 10.7498/aps.61.137701