Search

x
中国物理学会期刊
Dong Tai-Yuan, Ye Kun-Tao, Liu Wei-Qing. The current status of surface wave plasma source developmentJ. Acta Physica Sinica, 2012, 61(14): 145202. DOI: 10.7498/aps.61.145202
Citation: Dong Tai-Yuan, Ye Kun-Tao, Liu Wei-Qing. The current status of surface wave plasma source developmentJ. Acta Physica Sinica, 2012, 61(14): 145202. DOI: 10.7498/aps.61.145202

The current status of surface wave plasma source development

CSTR: 32037.14.aps.61.145202
PDF
导出引用
Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return