Study on the optical characteristic of black silicon antireflection coating prepared by plasma immersion ion implantation

Liu Jie; Liu Bang-Wu; Xia Yang; Li Chao-Bo; Liu Su

doi:10.7498/aps.61.148102

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Liu Jie, Liu Bang-Wu, Xia Yang, Li Chao-Bo, Liu Su. Study on the optical characteristic of black silicon antireflection coating prepared by plasma immersion ion implantationJ. Acta Physica Sinica, 2012, 61(14): 148102. DOI: 10.7498/aps.61.148102

Citation:

Liu Jie, Liu Bang-Wu, Xia Yang, Li Chao-Bo, Liu Su. Study on the optical characteristic of black silicon antireflection coating prepared by plasma immersion ion implantationJ. Acta Physica Sinica, 2012, 61(14): 148102. DOI: 10.7498/aps.61.148102

Citation:

Liu Jie, Liu Bang-Wu, Xia Yang, Li Chao-Bo, Liu Su. Study on the optical characteristic of black silicon antireflection coating prepared by plasma immersion ion implantationJ. Acta Physica Sinica, 2012, 61(14): 148102. DOI: 10.7498/aps.61.148102