The study on adaptability and effect of mesh-inducing for plasma immersion ion implantation on non-conductor polymer

Huang Yong-Xian; Leng Jin-Song; Tian Xiu-Bo; Lü Shi-Xiong; Li Yao

doi:10.7498/aps.61.155206

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Huang Yong-Xian, Leng Jin-Song, Tian Xiu-Bo, Lü Shi-Xiong, Li Yao. The study on adaptability and effect of mesh-inducing for plasma immersion ion implantation on non-conductor polymerJ. Acta Physica Sinica, 2012, 61(15): 155206. DOI: 10.7498/aps.61.155206

Citation:

Huang Yong-Xian, Leng Jin-Song, Tian Xiu-Bo, Lü Shi-Xiong, Li Yao. The study on adaptability and effect of mesh-inducing for plasma immersion ion implantation on non-conductor polymerJ. Acta Physica Sinica, 2012, 61(15): 155206. DOI: 10.7498/aps.61.155206

Citation:

Huang Yong-Xian, Leng Jin-Song, Tian Xiu-Bo, Lü Shi-Xiong, Li Yao. The study on adaptability and effect of mesh-inducing for plasma immersion ion implantation on non-conductor polymerJ. Acta Physica Sinica, 2012, 61(15): 155206. DOI: 10.7498/aps.61.155206