Effects of thermal treatments on the formation of nanocrystalline Si embedded in Si-rich oxide films

Cai Ya-Nan; Cui Can; Shen Hong-Lei; Liang Da-Yu; Li Pei-Gang; Tang Wei-Hua

doi:10.7498/aps.61.157804

Search

x

Cai Ya-Nan, Cui Can, Shen Hong-Lei, Liang Da-Yu, Li Pei-Gang, Tang Wei-Hua. Effects of thermal treatments on the formation of nanocrystalline Si embedded in Si-rich oxide filmsJ. Acta Physica Sinica, 2012, 61(15): 157804. DOI: 10.7498/aps.61.157804

Citation:

Cai Ya-Nan, Cui Can, Shen Hong-Lei, Liang Da-Yu, Li Pei-Gang, Tang Wei-Hua. Effects of thermal treatments on the formation of nanocrystalline Si embedded in Si-rich oxide filmsJ. Acta Physica Sinica, 2012, 61(15): 157804. DOI: 10.7498/aps.61.157804

Citation:

Cai Ya-Nan, Cui Can, Shen Hong-Lei, Liang Da-Yu, Li Pei-Gang, Tang Wei-Hua. Effects of thermal treatments on the formation of nanocrystalline Si embedded in Si-rich oxide filmsJ. Acta Physica Sinica, 2012, 61(15): 157804. DOI: 10.7498/aps.61.157804