Numerical simulation on the thermal deposition of optical surface irradiated by low energy ion beam in ion beam figuring

Yuan Zheng; Dai Yi-Fan; Xie Xu-Hui; Zhou Lin

doi:10.7498/aps.61.225201

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Yuan Zheng, Dai Yi-Fan, Xie Xu-Hui, Zhou Lin. Numerical simulation on the thermal deposition of optical surface irradiated by low energy ion beam in ion beam figuringJ. Acta Physica Sinica, 2012, 61(22): 225201. DOI: 10.7498/aps.61.225201

Citation:

Yuan Zheng, Dai Yi-Fan, Xie Xu-Hui, Zhou Lin. Numerical simulation on the thermal deposition of optical surface irradiated by low energy ion beam in ion beam figuringJ. Acta Physica Sinica, 2012, 61(22): 225201. DOI: 10.7498/aps.61.225201

Citation:

Yuan Zheng, Dai Yi-Fan, Xie Xu-Hui, Zhou Lin. Numerical simulation on the thermal deposition of optical surface irradiated by low energy ion beam in ion beam figuringJ. Acta Physica Sinica, 2012, 61(22): 225201. DOI: 10.7498/aps.61.225201