Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model

He Fu-Shun; Li Liu-He; Li Fen; Dun Dan-Dan; Tao Chan-Cai

doi:10.7498/aps.61.225203

Search

x

He Fu-Shun, Li Liu-He, Li Fen, Dun Dan-Dan, Tao Chan-Cai. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC modelJ. Acta Physica Sinica, 2012, 61(22): 225203. DOI: 10.7498/aps.61.225203

Citation:

He Fu-Shun, Li Liu-He, Li Fen, Dun Dan-Dan, Tao Chan-Cai. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC modelJ. Acta Physica Sinica, 2012, 61(22): 225203. DOI: 10.7498/aps.61.225203

Citation:

He Fu-Shun, Li Liu-He, Li Fen, Dun Dan-Dan, Tao Chan-Cai. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC modelJ. Acta Physica Sinica, 2012, 61(22): 225203. DOI: 10.7498/aps.61.225203